ESI Parameter
UTAC_TW (ESI9835)
laser stability setting 11%
spot size 0.8um to 1.5um
double or single blow pulse single
power settings Max 1.0uj
pulse rate 70kHz
energy tolerance 0.1~2.0uj
Wave Length 0.35um
Pulse Width 16ns +/-3ns @70,000Hz
Accuracy (um) Better than 0.18 um
Minimum Link Pitch 20um
Fuse Material aluminum
Work Station OS lunix